发明名称 METHOD FOR PRODUCING AMORPHOUS CARBON THIN FILM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for producing an amorphous carbon thin film, wherein the amorphous carbon thin film can be produced easily and inexpensively. <P>SOLUTION: The method for producing an amorphous carbon thin film includes a step of enclosing carbon dioxide and a hydrocarbon in a fluid layer 5 in a supercritical fluid cell 6 to form a supercritical state, and a step of irradiating the interior of the fluid layer 5 with laser light of an ultraviolet wavelength. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009096650(A) 申请公布日期 2009.05.07
申请号 JP20070267780 申请日期 2007.10.15
申请人 TOYO UNIV 发明人 MAEKAWA TORU;RANTONEN NYRKI;ISHII KOJI;NAKAJIMA YOSHITADA;HANAJIRI TATSURO
分类号 C01B31/02;C23C16/26;H01L21/314 主分类号 C01B31/02
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