发明名称 PHOTOSENSITIVE RESIN COMPOSITION, POLYMER COMPOUND, METHOD OF MANUFACTURING PATTERN, AND ELECTRONIC DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a polymer compound excellent in heat resistance and insulating property, to provide a photosensitive resin composition by using the compound, capable of giving a cured pattern or a cured film excellent in pattern forming property, resolution, heat resistance and insulating property, to provide a method of manufacturing a cured pattern excellent in pattern forming property, resolution, heat resistance and insulating property, and to provide electronic devices for semiconductor devices and for display devices with high reliability. <P>SOLUTION: The photosensitive resin composition includes(A) a polymer compound obtained by reacting a monomer expressed by general formula (1) and a monomer expressed by general formula (2), and (B) a photosensitive agent. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009098681(A) 申请公布日期 2009.05.07
申请号 JP20080247883 申请日期 2008.09.26
申请人 FUJIFILM CORP 发明人 HIKITA MASANORI;OISHI YASUSHI;SATO KENICHIRO
分类号 G03F7/023;C08G65/40;G03F7/004 主分类号 G03F7/023
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