ANTIFUSE STRUCTURE AND ARRAY

摘要

PROBLEM TO BE SOLVED: To provide an antifuse structure and an array.

SOLUTION: The antifuse structure includes a bit line formed in a first diffusion region inside a substrate, an insulating layer formed on the bit line, and a word line formed on the insulating layer. A second diffusion region formed at the peripheral part of the bit line is provided further. The bit line is a region doped with a first doping substance, and the second diffusion region is a region doped with a second doping substance. Element separating films formed at both side parts of the bit line are provided further.

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