| 摘要 |
PROBLEM TO BE SOLVED: To measure accurately a surface shape, even in the case of a specimen having a mirror surface mixed with a diffusion surface. SOLUTION: A floodlighting plate 2 diffuses each light from light sources 1-1 to 1-3 having each different light distribution characteristic by a projection part 2a, and floodlights it to a specimen 4. An angle measuring part 5b calculates a floodlighting angleθL based on the intensity ratio of each light reflected by the projection part 2a of the floodlighting part 2, reflected on the specimen 4 imaged by an imaging part 3, relative to each light distribution characteristic. A trigonometry measuring part 5c measures the surface shape of the specimen 4 by trigonometry with a base line length Lb, an imaging angleθc and the floodlighting angleθL. This invention can be applied to a shape measuring device. COPYRIGHT: (C)2009,JPO&INPIT
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