| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical characteristics measuring device and an optical characteristics measuring method, capable of measuring the optical characteristics, with higher accuracy, such as film thickness and refractive index, in a thin-film sample whose refractive index is unknown. SOLUTION: Extremal values (peak positions and valley positions) appearing in an absolute reflectivity spectrum at each measured incident angle are extracted. Wavenumber 1/λvalues which are the reciprocals of the wavelengthλvalues, corresponding to the extracted extremal values are acquired one by one. The wavenumber 1/λvalues are rearranged in their ascending order, i.e. in the descending order of the wavelengthλvalues, the order of the longest wavelengthλvalue is set with N=1, and integers obtained by increasing the order N by an increment of 1 each time are assigned one by one to the remaining ones. Parameters are determined through fitting, with respect to the relation with respect to the order N and the wavenumber 1/λ. COPYRIGHT: (C)2009,JPO&INPIT
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