| 摘要 |
A semiconductor device and a method thereof that maximizes DC and AC parameter properties of a MOS transistor having a buried channel. The device includes a semiconductor substrate having a device separation film, a gate pattern formed over the semiconductor substrate, a well region formed in the semiconductor substrate, the well region including a first doped region formed at a first predetermined depth, a second doped region formed at a second predetermined depth and a third doped region formed at a third predetermined depth, trenches formed at a source/drain region around the gate pattern, and a source/drain formed in the trenches. In accordance with embodiments, the first predetermined depth is lower than the second and third predetermined depths and the third predetermined depth is greater than the second predetermined depth.
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