发明名称 |
METHOD AND APPARATUS FOR SEALING AN OPENING OF A PROCESSING CHAMBER |
摘要 |
A method and apparatus for sealing an opening of a processing chamber are provided. In one embodiment, the invention generally provides a closure member integrated within a wall of a process chamber for sealing an opening within the wall of the chamber. In another embodiment, the invention provides a closure member configured to seal an opening in the wall of a processing chamber from the inside of the chamber.
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申请公布号 |
US2009114153(A1) |
申请公布日期 |
2009.05.07 |
申请号 |
US20080252055 |
申请日期 |
2008.10.15 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KURITA SHINICHI;MATSUMOTO TAKAYUKI;TINER ROBIN L.;WHITE JOHN M.;ANWAR SUHAIL |
分类号 |
C23C16/513;B65D43/14;B65D43/26;B65D51/00;B65D53/00 |
主分类号 |
C23C16/513 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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