| 摘要 |
<p>A substantially planar assembly for depositing material. The assembly comprises plates which, when assembled, define at least one aerosol channel, a sheath gas plenum, and a nozzle. These components are preferably anisotropic, and preferably rectangular. The aerosol channel may be divided further to improve uniformity of aerosol flow.</p> |
| 申请人 |
OPTOMEC, INC.;KING, BRUCE, H.;WOOLFSON, STEVEN, BARRY;RAMAHI, DAVID, H. |
发明人 |
KING, BRUCE, H.;WOOLFSON, STEVEN, BARRY;RAMAHI, DAVID, H. |
