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发明名称
Electropolishing electrolyte and method for planarizing a metal layer using the same
摘要
申请公布号
GB2434159(B)
申请公布日期
2009.05.06
申请号
GB20070007076
申请日期
2005.10.01
申请人
BASF AKTIENGESELLSCHAFT
发明人
JIA MIN SHIEH;SUE HONG LIU;DAI BOU TONG
分类号
C25F3/00;H01L21/32
主分类号
C25F3/00
代理机构
代理人
主权项
地址
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