首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Method of deposition of silicon carbide film in integrated circuit fabrication
摘要
申请公布号
EP1176226(B1)
申请公布日期
2009.05.06
申请号
EP20010116054
申请日期
2001.07.02
申请人
APPLIED MATERIALS, INC.
发明人
NEMANI, SRINIVAS D.;XIA, LI-QUN;SUGIARTO, DIAN;YIEH, ELLIE;XU, PING;CAMPANA-SCHMITT, FRANCIMAR;LEE, JIA
分类号
C23C16/32;C23C16/42;H01L21/20;H01L21/314;H01L21/768;H01L23/522
主分类号
C23C16/32
代理机构
代理人
主权项
地址
您可能感兴趣的专利
SYSTEMS AND METHODS OF MICROFLUIDIC MEMBRANELESS EXCHANGE USING FILTRATION OF EXTRACTION OUTLET STREAMS
DEVELOPER COLLECTING DEVICE AND IMAGE FORMING APPARATUS
OPEN/CLOSE MECHANISM FOR PAPER TRAY FOR USE IN IMAGE FORMING APPARATUS
Device And Method For Monitoring A Hadron Beam
TABLET ELECTRONIC DEVICE
Systems and Methods for Panel Enhancement with Transaction Data
IN SITU HEAT INDUCED ANTIGEN RECOVERY AND STAINING APPARATUS AND METHOD
PACKAGE STRUCTURE WITH MICRO-ELECTROMECHANICAL ELEMENT AND MANUFACTURING METHOD THEREOF
Advanced Data Encoding With Reduced Erasure Count For Solid State Drives
SERVICE ORIENTED ARCHITECTURE VERSION AND DEPENDENCY CONTROL
METHOD AND SYSTEM FOR ANALYZING AND TRANSLATING VARIOUS LANGUAGES WITH USE OF SEMANTIC HIERARCHY
METHODS OF TREATING HYPERTRIGLYCERIDEMIA
DOWNLINK CONTROL IN HETEROGENEOUS NETWORKS
CHARGED PARTICLE BEAM MICROSCOPE AND MEASURING METHOD USING SAME
IMAGE SENSOR HAVING SUB-SAMPLING FUNCTION
PUMP ASSEMBLY AND METHOD OF MANUFACTURING SAME
METHOD FOR PRODUCING COILS
Magnetic Sheet Systems
TECHNIQUES FOR AUTOMATING RENTAL CAR TRANSACTIONS
Torsion Constrained Stent Delivery System
