| 摘要 |
<p>An excimer lamp, including a discharge vessel made of silica glass and having a discharge space; a pair of electrodes disposed on the discharge vessel, wherein the discharge space is filled with xenon gas; and an ultraviolet reflection film made from ultraviolet scattering particles, including silica particles and alumina particles, formed on a surface of the discharge vessel exposed to the discharge space. A thickness Y of the ultraviolet reflection film satisfies the expression Y > 4X + 5, given that a mean particle diameter of the ultraviolet scattering particles making up the ultraviolet reflection film is X (µm).</p> |
