发明名称 ZINC OXIDE BASED TRANSPARENT ELECTRIC CONDUCTOR, SPUTTERING TARGET FOR FORMING OF THE CONDUCTOR AND PROCESS FOR PRODUCING THE TARGET
摘要 <p>Provided is a zinc oxide transparent electric conductor having zinc oxide (ZnO) as its principal component, containing an element to become an n-type dopant to zinc oxide, containing metal M in which P (P = (G + H mix)/RT, wherein G is the Gibbs free energy at temperature T of the metal, H mix is the mixing enthalpy at temperature T of zinc oxide and the metal, R is the gas constant, and T is the temperature) as a parameter showing the wettability with zinc oxide is 6 or less and in which its resistivity is smaller than the resistivity of zinc oxide added with the n-type dopant, and wherein concentration of metal M in relation to the total atomicity of zinc and the n-type dopant and metal M, which are all metal atoms configuring the zinc oxide transparent electric conductor, is 0.05 to 2.0at%. In the development of a transparent electric conductor that does not contain raw material In which is expensive and with concern of resource depletion, provided is a low resistivity transparent electric conductor by exceeding the limits of the conventional development technique of the single dopant method, presenting guidelines for selecting a secondary additive material effective in achieving low resistivity, and indicating types of specific materials and the appropriate concentration range.</p>
申请公布号 EP2056304(A1) 申请公布日期 2009.05.06
申请号 EP20070743921 申请日期 2007.05.23
申请人 NIPPON MINING & METALS CO., LTD. 发明人 IKISAWA, MASAKATSU;YAHAGI, MASATAKA
分类号 H01B1/08;C04B35/453;C23C14/08;C23C14/34;H01B5/14 主分类号 H01B1/08
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