发明名称 Photosensitive composition, pattern-forming method using the photosensitive composition and compounds used in the photosensitive composition
摘要 A photosensitive composition, which comprises (A) a compound capable of generating an organic acid represented by formula (I) upon irradiation with actinic ray or radiation: wherein Z represents a monovalent organic group, when two Z's are present, the two Z's may be the same or different, and they may be bonded to each other to form a cyclic structure; X represents -CO- or -SO2-, when two X's are present, the two X's may be the same or different; R represents a monovalent organic group, when two R's are present, the two R's may be the same or different, and they may be bonded to each other to form a cyclic structure; Z and R may be bonded to each other to form a cyclic structure; and n represents an integer of 1 or 2; and the compound capable of generating the organic acid represented by formula (I).
申请公布号 US7527911(B2) 申请公布日期 2009.05.05
申请号 US20070708017 申请日期 2007.02.20
申请人 FUJIFILM CORPORATION 发明人 WADA KENJI
分类号 G03F7/004;G03F7/30 主分类号 G03F7/004
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