发明名称 Low tunneling current MIM structure and method of manufacturing same
摘要 Disclosed herein are new MIM structures having increased capacitance with little or no tunneling current, and related methods of manufacturing the same. In one embodiment, the new MIM structure comprises a first electrode comprising a magnetic metal and having a magnetic moment aligned in a first direction, and a second electrode comprising a magnetic metal and having a magnetic moment aligned in a second direction antiparallel to the first direction. In addition, such an MIM structure comprises a dielectric layer formed between the first and second electrodes and contacting the first and second magnetic metals.
申请公布号 US7529078(B2) 申请公布日期 2009.05.05
申请号 US20060379478 申请日期 2006.04.20
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 WANG YU-JEN;LIN HSING-LIEN;TU YEUR-LUEN
分类号 H01G4/38 主分类号 H01G4/38
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