| 摘要 |
The objects of the present invention are to provide a high-accuracy EGR sensor, and EGR system which adopts the above sensor to measure EGR rate. The gas flow meter comprises a sensor section for measuring fluid flow rate and controller for controlling signals transmitted into and out of the sensor section, and is controlled at a working temperature of 350 to 700° C., wherein a protective coat formed on the sensor section has resistance to temperature at which deposition of a PM component in exhaust gases can be prevented.
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