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发明名称
Film formation apparatus for manufacturing a light emitting element
摘要
申请公布号
KR100895876(B1)
申请公布日期
2009.05.04
申请号
KR20080072388
申请日期
2008.07.24
申请人
发明人
分类号
H05B33/10;C23C14/04;C23C14/12;C23C14/56;H01L51/00;H01L51/40;H01L51/50
主分类号
H05B33/10
代理机构
代理人
主权项
地址
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