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发明名称
抵抗电子迁移的互连结构
摘要
一线形沟槽系形成在一可包含一层间介电材料之介电层中。一金属衬层系形成在该线形沟槽之侧壁及底部表面上。一导电金属系沈积在该线形沟槽之剩余部分内,其至少上达该介电层之一顶部表面,并经过平坦化以在该线形沟槽中形成一金属线。该金属线藉由在该介电层之顶部表面下方之凹部蚀刻而凹入。一介电线盖或一金属线盖系藉由沈积一介电盖层或一金属盖层而形成,其后接着该介电或金属盖层之平坦化。该介电线盖或该金属线盖在下面的该金属线上施加一高度压缩应力,其增加该金属线对电子迁移之抵抗。
申请公布号
TW200919635
申请公布日期
2009.05.01
申请号
TW097129895
申请日期
2008.08.06
申请人
万国商业机器公司
发明人
杨海宁S;杨智超;黄洸汉
分类号
H01L21/768(2006.01);H01L21/321(2006.01)
主分类号
H01L21/768(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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