| 摘要 |
A spectroscopic ellipsometer has a polarized light generating part for generating elliptically polarized lights of a plurality of wavelengths included in a predetermined measurement wavelength band from white light and directing the elliptically polarized lights to a measurement surface of a substrate, a rotating analyzer where reflected light reflected on the measurement surface enters, and a spectrometer for acquiring spectral intensity of light from the rotating analyzer. A polarization state acquiring part in a control part acquires a polarization state at each wavelength in the measurement wavelength band of the reflected light. The optical characteristic calculation part obtains a film thickness on the measurement surface with high accuracy on the basis of differences between measurement values and theoretical values, the measurement values representing change of a complex amplitude ratio between a p-polarized component and an s-polarized component and a phase difference between a p-polarized component and an s-polarized component.
|
