| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection device for speeding up defect detection and enhancing the accuracy thereof by a simple structure. SOLUTION: This visual inspection device is equipped with an imaging part 1 and an inspection part 2. The imaging part 1 comprises a plurality of sets each made up of an imaging means 3 for imaging an inspected surface 110 of an inspecting object 100 and a light projection means 4 projecting light onto the inspected surface 110 imaged by the imaging means 3. The inspection part 2 comprises: a pixel extraction means 7 for extracting pixels whose density differences are equal to or more than a prescribed threshold from a gray image acquired by the imaging means 3 of the imaging part 1; a joining domain preparation means 8 for preparing joining domains by together joining the pixels extracted by the extraction means 7 in pixels next to characteristic pixels; and a defect determination means 9 for determining that joining domains are caused by a defect of the inspected surface 110 if the sizes of the joining domains are equal to or larger than a prescribed value. The respective imaging means 3 are disposed in positions preventing respective imaging areas from overlapping with each other while the respective projection means 4 are disposed in positions causing their light projecting directions to cross each other in planes paralleling the inspected surface 110. COPYRIGHT: (C)2009,JPO&INPIT
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