| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of nondestructively inspecting a state of conductive plating applied to an internal wall of a through hole formed in a printed board and accurately making an inspection also on a large-sized printed board. SOLUTION: The X-ray inspection device arranging an X-ray generator 12 comprising an X-ray focus 12a and an X-ray detector 13 opposedly on both sides of a sample stand 11 placing a sample S and movable in an XY axis direction, is constituted to detect by the X-ray detector 13 X-rays radiated from the X-ray focus 12a and transmitted through a sample S. The X-ray inspection device includes a rotating mechanism 16 rotating the X-ray generator 12 so that the X-ray focus 12a is rotated around an axis L2 orthogonal to a placing surface of the sample stand 11, and a rotating mechanism 18 rotating the X-ray detector 13 around the axis L2. The rotation of the X-ray generator 12 and the rotation of the X-ray detector 13 are synchronized. COPYRIGHT: (C)2009,JPO&INPIT
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