| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for accurately measuring the thickness of an object to be inspected in a non-contact manner. SOLUTION: An I-Z curve indicating a relationship between a distance from an objective lens to an object to be inspected and a fluorescent intensity generated from a portion in the vicinity of a convergent point of excitation light, is acquired. Next, a dI/dZ-Z curve indicating a relationship between the distance from the objective lens to the object to be inspected and a change of the fluorescent intensity is formed on the basis of the I-Z curve. A difference "d" between the distance from the objective lens to the object to be inspected giving a maximum value of the change of the fluorescent intensity and the distance from the objective lens to the object to be inspected giving a minimum value of the change of the fluorescent intensity, is obtained, on the basis of the dI/dZ-Z curve. The difference "d" is an air-converted thickness of the object to be inspected. After that, a refraction index of the object to be inspected is multiplied to the air-converted thickness to compute the actual thickness of the object to be inspected. COPYRIGHT: (C)2009,JPO&INPIT
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