| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspecting apparatus capable of efficiently inspecting the surface and backside of a substrate. SOLUTION: The substrate inspecting apparatus 1 has a front inspecting section 5 and a backside inspecting section arranged so as to sandwich a floating stage for floating a glass substrate W by using air. Both of the inspecting sections have inspecting microscope units 55 each being configured to flexibly move in the width direction perpendicular to a feed direction of the glass substrate W. When each inspecting microscope unit 55 carries out an inspection using an incident light illumination, respective objective lenses are arranged such that their optical axes coincide with each other, thereby inspections of the front and the backside of the same portion can be carried out simultaneously. Furthermore, an illumination unit is disposed for an inspection which is carried out by each inspecting microscope unit 55 by using a transmission illumination. COPYRIGHT: (C)2009,JPO&INPIT
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