CASSETTE PROCESSING SYSTEM HAVING BUFFER SPACE

摘要

A cassette processing system having a butter unit is provided to improve yield by reducing loading/unloading time from a cassette to a wafer table. A linear movement part(130) moves a shuttle(110) for transferring a cassette in a linear direction. An up and down movement part(120) moves the shuttle for transferring the cassette combined in the lower part of the linear movement part up and down. A buffer unit includes a shelf member(210), a connection stand(230) and a guide rail(240). The shelf member supports the lower part of the cassette suspended in the shuttle for transferring the cassette. One end of the connection stand is supported by one side of the shelf member. The other end of the connection stand is connected to a mover(220) connected to a load(320) moved by the medium of a left and right moving part(260). The guide rail guides withdrawal and insertion operation of the shelf member. The guide rail includes a fixing rail fixed to an inner part of the lower part of the buffer unit frame and a moving rail fixed to ones side of the shelf member.