| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for accurately measuring surface charge distribution without losing the surface charge distribution on the surface of a sample. SOLUTION: The method is provided for measuring the surface charge distribution of the sample SP with charge on the surface by a detection signal obtained by irradiating the sample SP with charged particle beams to scan one-dimensionally or two-dimensionally, wherein scanning is carried out by setting the irradiation current of the charged particle beams to the grade of not losing the surface charge distribution of the sample. COPYRIGHT: (C)2009,JPO&INPIT
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