| 摘要 |
PROBLEM TO BE SOLVED: To improve detection accuracy by reducing the dispersion of detection sensitivity of an impedance sensor. SOLUTION: The impedance sensor of this invention used for detecting mixed ratio, or the like of liquid or gas by putting it into the liquid or the gas is constituted of a substrate; a pair of interdigital electrodes disposed on the substrate; and a protective film disposed on the surface of the substrate like covering the interdigital electrodes, the material of the protection film, the dielectric constant of which is 6 or larger is used. According to this constitution, the dispersion of the detection sensitivity can be made small and the detection accuracy can be improved. COPYRIGHT: (C)2009,JPO&INPIT
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