| 摘要 |
PROBLEM TO BE SOLVED: To provide a control device and a control method of a vacuum pump capable of inhibiting occurrence of an overload trip and an overvoltage trip by effectively utilizing regenerative energy generated during normal operation in the two stage vacuum pump. SOLUTION: This device is provided with a first motor drive means 5 driving a first motor 52, a second motor drive means 6 driving a second motor 54, a regenerative electric power extraction means 4 extracting regenerative electric power generated by the first motor drive means 5 or the second motor drive means, and a control means 20 controlling operation of the first motor drive means 5 and the second motor drive means 6. The first motor drive means 5 and the second motor drive means 6 are connected in parallel with the regenerative electric power extraction means 4. The control means 20 executes control to supply regenerative electric power extracted from one of the first motor drive means 5 and the second motor drive means 6 by the regenerative electric power extraction means 4 to another motor drive means. COPYRIGHT: (C)2009,JPO&INPIT
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