发明名称 SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURE
摘要 In various embodiments, semiconductor structures and methods to manufacture these structures are disclosed. In one embodiment, a semiconductor device includes a plurality of rectilinear structures, wherein the plurality of rectilinear structures comprise silicon dioxide and extend from a surface of a semiconductor material to a distance of at least about three microns or greater below the surface of the semiconductor material and wherein a first rectilinear structure of the plurality of rectilinear structures is perpendicular to, or substantially perpendicular to, a second rectilinear structure of the plurality of rectilinear structures. Other embodiments are described and claimed.
申请公布号 WO2009055108(A1) 申请公布日期 2009.04.30
申请号 WO2008US71152 申请日期 2008.07.25
申请人 HVVI SEMICONDUCTORS, INC.;DAVIES, ROBERT, BRUCE 发明人 DAVIES, ROBERT, BRUCE
分类号 H01L21/00 主分类号 H01L21/00
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