POWER SUPPLY FOR ELECTRON GUN AND ELECTRON MICROSCOPE HAVING THE SAME

摘要

A power supply for supplying an electric power to an electron gun, which is used in an electron microscope, and an electron microscope having the same are disclosed. The power supply includes a base board, and at least one sub-board vertically mounted on the base board to supply an electric power to an anode electrode, a filament for emitting electrons, and a grid. The at least one sub-board can include a first sub-board to supply an accelerating volatage to the anode electrode, a second sub-board to supply a heating current to the filament, and a third sub-board to supply a grid volatage to the grid.