发明名称 DATA AGE COMPENSATION WITH AVALANCHE PHOTODIODE
摘要 A method is disclosed including conditioning a measurement signal from an interferometer, said conditioning characterized by one or more conditioning parameters; measuring a plurality of values for the conditioned measurement signal; providing one or more values indicative of the conditioning parameters; determining an adjustment value at each measured value of the conditioned measurement signal based on the one or more of the measured values indicative of the conditioning parameters; and adjusting a measured value of the measurement signal according to the adjustment value.
申请公布号 WO2007064643(A3) 申请公布日期 2009.04.30
申请号 WO2006US45555 申请日期 2006.11.29
申请人 ZYGO CORPORATION;DEMAREST, FRANK, C. 发明人 DEMAREST, FRANK, C.
分类号 G01B9/02 主分类号 G01B9/02
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