发明名称 |
DATA AGE COMPENSATION WITH AVALANCHE PHOTODIODE |
摘要 |
A method is disclosed including conditioning a measurement signal from an interferometer, said conditioning characterized by one or more conditioning parameters; measuring a plurality of values for the conditioned measurement signal; providing one or more values indicative of the conditioning parameters; determining an adjustment value at each measured value of the conditioned measurement signal based on the one or more of the measured values indicative of the conditioning parameters; and adjusting a measured value of the measurement signal according to the adjustment value.
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申请公布号 |
WO2007064643(A3) |
申请公布日期 |
2009.04.30 |
申请号 |
WO2006US45555 |
申请日期 |
2006.11.29 |
申请人 |
ZYGO CORPORATION;DEMAREST, FRANK, C. |
发明人 |
DEMAREST, FRANK, C. |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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