| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enable a protection tape to be peeled precisely by uniformly curing the adhesive of an ultraviolet curing type protective tape. <P>SOLUTION: Ultraviolet rays are applied onto the surface of the protective tape PT from an ultraviolet ray generator 52. In addition, ultraviolet rays having intensity higher than that from the ultraviolet ray generator 52 are applied onto a wafer edge in a spot diameter shape by an irradiation gun 54. In this case, the ultraviolet ray intensity, and the rotation speed of a holding table 8 are controlled by a controller 56 so that the ultraviolet irradiation amount per unit area of the wafer edge portion becomes equal to that to the sticking surface of the protective tape PT. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
