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发明名称
Verfahren zum Anhaften von Polierkissen und Aufspannvorrichtung zum Anhaften derselben
摘要
申请公布号
DE602006005755(D1)
申请公布日期
2009.04.30
申请号
DE20066005755T
申请日期
2006.10.12
申请人
FUJIKOSHI MACHINERY CORP.
发明人
NAKAMURA, YOSHIO;KOYAMA, HARUMICHI
分类号
B24B7/17;B24B37/08;B24B37/12;B24B37/20;H01L21/304
主分类号
B24B7/17
代理机构
代理人
主权项
地址
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