TEST CIRCUIT, SEMICONDUCTOR WAFER DEVICE, AND TEST METHOD

摘要

PROBLEM TO BE SOLVED: To provide a test circuit capable of specifying a place generating a contact failure, and to provide a semiconductor wafer device and a test method. SOLUTION: The test circuit includes: a contact chain 50 which contains a plurality of serially-connected contact resistances R; transistors TR in which a source region 17a is electrically connected to a connection point P of the adjacent contact resistances R; and a fuse 22 whose one end is electrically connected to a drain region 17b. COPYRIGHT: (C)2009,JPO&INPIT