| 摘要 |
A reaction apparatus for producing trichlorosilane and a method for producing trichlorosilane are provided to improve production efficiency of the trichlorosilane and to minimize generation of silicon tetrachloride to the utmost. A reaction apparatus for producing trichlorosilane includes a main body(11) having a rough cylinder shape. A silicon powder supply port(12) is formed on a lower part of side wall of the main body. The silicon powder supply port supplies metal silicon powder(M) to inside of the main body. A gas outlet(14) is formed on an upper part of the main body. A stirring unit(15) is rotated by a motor(15A) installed on a lower part of the main body. A gas induction unit(16) is installed on a lower part of a partitioning plate(11A) installed in parallel on the lower part of the main body. The gas induction unit includes a gas chamber(17), a gas supply inlet(18) and a plurality of ejecting members(19).
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