发明名称 Measurement of effective capacitance
摘要 A method for determining an effective capacitance of a dielectric material, by forming first and second asymmetrical electrodes entirely within a field of the dielectric material, where the first electrode, the second electrode, and the field of the dielectric material are co-planar, neither the first electrode nor the second electrode are either electrically connected to ground or to each other, applying a first charge Q on the first electrode, measuring a first voltage change V1 on the first electrode, measuring a second voltage change V2 on the second electrode, depositing a second charge Q' on the second electrode, measuring a third voltage change V3 on the first electrode, measuring a fourth voltage change V4 on the second electrode, calculating a first ground capacitance Cg1 by Cg1=(V2Q'-V4Q)/(V2V3-V1V4), calculating a second ground capacitance Cg2 by Cg2=(V3Q-V1Q')/(V2V3-V1V4), and calculating an inter-electrode capacitance Cie by Cie=V3Cg1/(V4-V3)=V2Cg2/(V1-V2).
申请公布号 US7525304(B1) 申请公布日期 2009.04.28
申请号 US20070748207 申请日期 2007.05.14
申请人 KLA-TENCOR CORPORATION 发明人 FENG YIPING;SHI JIANOU;ZHANG XIAFANG
分类号 G01R31/28;G01R31/26 主分类号 G01R31/28
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