MICRO ACTUATOR, OPTICAL UNIT, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

A pair of support members (54A, 54B) each having a spring unit support a mirror element (52). A pair of drive mechanisms (66A, 66B) arranged to correspond to the pair of support members deform the spring units of the corresponding support members so a to change a distance between a support point where the support members support the mirror element and a base (BS). With this configuration, it is possible to parallel-translate the mirror element by driving all the drive mechanisms and incline the mirror element against the base by driving a part of the drive mechanisms.