发明名称 |
PARALLELISM ADJUSTING MECHANISM OF PROBE CARD |
摘要 |
A parallelism adjusting mechanism of a probe card is provided. The parallelism adjusting mechanism can bring probes held by a probe card into uniform contact with a wafer even if a parallelism between a mounting reference surface for the probe card and the wafer as a test object is lost. To achieve this purpose, specifically, to adjust a parallelism of a probe card (101) that holds a plurality of probes (1) for electrically connecting a wafer (31) as a test object and a circuitry for generating a signal for a test with respect to the wafer (31), adjusting screws (22) as at least part of an inclination changing unit are provided. The inclination changing unit changes a degree of inclination of the probe card (101) with respect to a mounting reference surface (S 1 ) of a prober (202) for mounting the probe card (101) thereon.
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申请公布号 |
EP2051293(A1) |
申请公布日期 |
2009.04.22 |
申请号 |
EP20070791403 |
申请日期 |
2007.07.26 |
申请人 |
NHK SPRING CO., LTD. |
发明人 |
YAMADA, YOSHIO;NAKAYAMA, HIROSHI;NAGAYA, MITSUHIRO;INUMA, TSUYOSHI;AKAO, TAKASHI |
分类号 |
H01L21/66;G01R31/28 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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