SPECIMEN MEASURING METHOD AND SCANNING MICROSCOPE,申请号KR20020062036-传众专利搜索

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发明名称	SPECIMEN MEASURING METHOD AND SCANNING MICROSCOPE
摘要
申请公布号	KR100893910(B1)	申请公布日期	2009.04.21
申请号	KR20020062036	申请日期	2002.10.11
申请人		发明人
分类号	G01B15/00;H01J37/22;H01J37/28;H01L21/66;(IPC1-7):G01B15/00	主分类号	G01B15/00
代理机构		代理人
主权项
地址

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