METHOD FOR MANUFACTURING SILICON CONTACTOR

摘要

A method for manufacturing a silicon contactor is provided to miniaturize a lead terminal of a semiconductor device by forming contact parts for electrical connection with a minute pitch. A conductive string of a yarn structure is formed by mixing the conductive powder into an elastic body like a silicon rubber(S1). An upper mold and a lower mold with a plurality of penetration holes formed with a regular interval are prepared(S2). The support bar is arranged in the space between upper and lower molds(S3). The conductive string is combined through a hollow of a ring with abrasion resistance by inserting the ring with abrasion resistance into at least one of he penetration holes of upper and lower moldes(S4). The conductive string is inserted to the penetration holes of upper and lower molds in a vertical direction(S5). The conductive string is arranged in upper and lower molds. The silicon rubber is injected between upper and lower molds. The conductive strings are fixed(S6). The conductive strings between the penetration holes of the upper and lower molds are surrounded by the silicon rubber by separating the upper mold and the lower mold. The silicon contactor is manufactured in an upper surface and a lower surface of the silicon contactor by performing a trimming operation(S7).