SPIN COATING APPARATUS AND COATED SUBSTRATE MANUFACTURED USING THE SAME,申请号EP20040774362-传众专利搜索

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发明名称	SPIN COATING APPARATUS AND COATED SUBSTRATE MANUFACTURED USING THE SAME
摘要
申请公布号	EP1656671(A4)	申请公布日期	2009.04.08
申请号	EP20040774362	申请日期	2004.08.20
申请人	LG CHEM. LTD.	发明人	KANG, TAE-SIK;HAN, MI-YOUNG;LEE, SEONGKEUN;JANG, SUNG-HOON;HONG, YOUNGJUN
分类号	G11B7/26;H01L21/00;H01L21/687	主分类号	G11B7/26
代理机构		代理人
主权项
地址

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