LOW TEMPERATURE CO-FIRED CERAMICS AND METHOD OF MANUFACTURING THE SAME

摘要

A low temperature co-fired ceramic substrate and a manufacturing method thereof are provided to prevent a crack generation in a hetero-junction between ceramic layers having different coefficient of thermal expansion by including a buffer layer. A low temperature co-fired ceramic substrate(100) comprises a firs ceramic layer(111), a second ceramic layer(112), and a buffer layer(110). The first ceramic layer is made of material having a first coefficient of thermal expansion. The second ceramic layer is made of material having a second coefficient of thermal expansion higher than the first coefficient of thermal expansion. The buffer layer is positioned between the first ceramic layer and the second ceramic layer, and includes a first region(111') and a second region(112'). The first region is made of material such as the first ceramic layer. The second region is made of material such as the second ceramic layer, and has a plurality of through hole filling regions. The buffer layer prevents a defect due to the coefficient of thermal expansion between the first ceramic layer and the second ceramic layer.