SHEET PLASMA FILM FORMING APPARATUS

摘要

A sheet plasma film forming apparatus is provided with a plasma gun (1); a sheet plasma deforming mechanism for deforming plasma flowing between a cathode (13) and an anode (42) into a sheet shape; a film forming chamber (3) wherein the sheet-like plasma (hereinafter, referred to as sheet plasma) (SP) flows; a first magnetic field generator (36), which generates magnetic field wherein a magnetic line directs toward the sheet plasma (SP) from the substrate (24), on a side close to the sheet plasma (SP) in a space (herein after, referred to as substrate space) (39) formed between the sheet plasma (SP) inside the film forming chamber (3) and the substrate (24); and a second magnetic field generator (37), which generates magnetic field wherein a magnetic line directs toward the substrate (24) from the sheet plasma (SP), on a side close to the substrate (24) in the substrate space (39).