<p>A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.</p>
申请公布号
WO2009002888(A3)
申请公布日期
2009.04.02
申请号
WO2008US67810
申请日期
2008.06.21
申请人
ASYST TECHNOLOGIES, INC.;BONORA, ANTHONY, C.;MARTIN, RAYMOND, S.;KROLAK, MICHAEL
发明人
BONORA, ANTHONY, C.;MARTIN, RAYMOND, S.;KROLAK, MICHAEL