发明名称 WASHING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a washing apparatus which turns a flow of a washing fluid upward to minimize a downward flow, clarifies the relationship between the aperture rates of a flow regulation plates and of a diffusion plate and the dispersion of liquid flows, and is provided with a means capable of real-timely monitoring the dispersion of liquid flows. SOLUTION: The washing apparatus of the present invention is provided with a washing barrel which holds an upwardly flowing washing fluid, flow regulation plates on the surface of each of which small holes through which a washing fluid passes and which are arranged on the bottom of the washing barrel, and a diffusion plate on the surface of which small holes through which the washing fluid passes and which is situated in position above the feed port of the washing fluid and below the flow regulation plates. Further, the washing apparatus is provided with a means having a flow regulation monitoring mechanism which can visualize the liquid flow near the inside wall of the washing barrel by having one or more fine threads fixed on the inside wall of the washing barrel to real-timely monitor the dispersion of liquid flows. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009066540(A) 申请公布日期 2009.04.02
申请号 JP20070238670 申请日期 2007.09.14
申请人 HITACHI DISPLAYS LTD 发明人 EZAKI HIROSHI;TAKAHASHI HIROKI;TAKAHARA YOICHI;FURUHASHI SHOJI
分类号 B08B3/04;H01L21/304 主分类号 B08B3/04
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