| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress vibration of a second table supported on a first table which is movable in one horizontal direction. <P>SOLUTION: The device 1 includes: an XY-axis table 2 movable in the X direction; a Z-axis table 4 supported by a supporting device 3 above the XY-axis table 2; a pair of scales 10a, 10b arranged spaced apart in the X direction from each other for detecting a Z-directional velocity of the Z-axis table 4; a pair of motors 11a, 11b arranged spaced apart in the X direction from each other for driving the Z-axis table 4 in the vertical direction; and a controller 12 for controlling drive of the motors 11a, 11b based on a detected Z-directional velocity. The stage device 1 performs processes of: detecting the Z-directional velocity by the scales 10a, 10b to make out a pitching vibration behavior of the Z-axis table 4; and driving the motors 11a, 11b to rotate the Z-axis table 4 in the pitching direction P so as to compensate for the pitching vibration. <P>COPYRIGHT: (C)2009,JPO&INPIT |
