发明名称 |
Photo Sensor and a Method for Manufacturing Thereof |
摘要 |
According to a method of manufacturing photo sensor, a diode can be formed by one lithography step. In addition, the source/drain is arranged on a gate dielectric layer to avoid the conventional plug structure. Moreover, a diode stack is formed on one of the source/drain to simplify the structure of the photo sensor.
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申请公布号 |
US2009085076(A1) |
申请公布日期 |
2009.04.02 |
申请号 |
US20080115765 |
申请日期 |
2008.05.06 |
申请人 |
PRIME VIEW INTERNATIONAL CO., LTD. |
发明人 |
LAN WEI-CHOU;WANG HENRY;CHEN LEE-TYNG |
分类号 |
H01L27/146;H01L31/18 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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