| 摘要 |
PROBLEM TO BE SOLVED: To provide a condenser microphone with high strength of a plate. SOLUTION: The condenser microphone is provided with: a support part; the plate which is supported by the support part, and has a through hole group constituted of a plurality of through holes and a fixed electrode; and a diaphragm which has a movable electrode opposite to the fixed electrode and vibrates by sound wave. Then, the plate has a plurality of flat parts with different height in the film thickness direction, a step part forming a level difference between the adjacent flat parts, and the plurality of through holes penetrate the flat parts in the film thickness direction of the plate. COPYRIGHT: (C)2009,JPO&INPIT
|
