| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of scanning in the arbitrary direction of an inspection object region of a sample and using high throughput electron beams. SOLUTION: Conversion parts 8, 9 which individually perform coordinate-conversion in each horizontal (X) direction and vertical direction (Y) are provided at a scan control part 12 to form two dimensional coordinates for scanning electron beams of a scanning electron microscope, and the electron beams are scanned in the arbitrary direction in the inspection object region of the sample. These conversion parts 8, 9 are constituted of small capacity conversion tables (LUT) capable of high speed operation individually in each of the horizontal (X) direction and the vertical (Y) direction, and by being combined with a large capacity conversion table (LUT) storing coordinate conversion data corresponding to a plurality of scanning types, an inspection device which is can be adapted to a plurality of types of scanning, has multiple functions, and can perform high-speed scan control can be obtained. COPYRIGHT: (C)2009,JPO&INPIT
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