| 发明名称 |
Method of manufacturing a substrate, in particular for optics, electronics or optoelectronics, and substrate obtained through said method |
| 摘要 |
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| 申请公布号 |
EP1791170(B1) |
申请公布日期 |
2009.04.01 |
| 申请号 |
EP20070100845 |
申请日期 |
2001.11.26 |
| 申请人 |
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES |
发明人 |
LETERTRE, FABRICE;GHYSELEN, BRUNO |
| 分类号 |
H01L21/20;H01L33/00;C30B25/02;C30B25/18;H01L21/04;H01L21/762 |
主分类号 |
H01L21/20 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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