发明名称 |
PIEZOELECTRIC FILM SENSOR |
摘要 |
Disclosed is a piezoelectric/electrostrictive membrane sensor 20 wherein the main component of terminal electrodes 18, 19 is contained in the vicinity of the surface of a piezoelectric/electrostrictive body 5. The membrane sensor 20 is hardly electrostatically charged and thus prevented from electrostatic discharge damage and attraction of dust, dirt or the like.
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申请公布号 |
EP2042851(A1) |
申请公布日期 |
2009.04.01 |
申请号 |
EP20070768381 |
申请日期 |
2007.07.04 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
OHNISHI, TAKAO;SHIMIZU, HIDEKI;KOIZUMI, TAKAAKI |
分类号 |
G01N11/14;H01L41/08;H01L41/09;H01L41/187 |
主分类号 |
G01N11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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