ATOMIC CELL AND METHOD FOR MANUFACTURING THE SAME

摘要

An atomic cell and a manufacturing method thereof are provided to increase an output power of a battery by improving a shape of a semiconductor device. An atomic cell comprises a semiconductor substrate(10), an emitter layer(20), and a solid source layer(30). A contact dimension expansion part(90) is formed on a top part of the semiconductor substrate. The emitter layer is formed into a shape corresponding to the contact dimension expansion part according to the contact dimension expansion part. The solid source layer is formed on the emitter layer according to the emitter layer, emits a beta ray, and includes a tritiated metal layer. The tritiated metal layer is made of material including one among titanium and zirconium. Thickness of the tritiated metal layer is 0.2 ~ 1.0 um.